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| Microfluidics in a flexible substrate. |
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| Quickskin™ is a UTA patented
pressure sensitive robot skin. |
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Objective:
Fabrication of the bio compatible
polymeric materials with embedded actuators and sensors.
Approach:
- High strain elastomer materials are selected
as polymeric substrates.
- Piezoelectric fiber composite actuators are embedded
in the elastomer.
- Micro sensors and fluidics are arrayed in the
elastomer matrix.
- Integration with microelectronics,
digital signal processors and wireless communications.
Accomplishments:
Pictures below shows the porous structure of the silicone
based elastomer and the same material after embedding
the sensors and actuators. Flexibility of the elastomer
matrix is not affected by the micro piezoelectric actuators.
Publications
[1] |
Enhanced Magnetoelectric Effect in (1 − x) Pb(Zr0.52Ti0.48)O3-x NiFe1.9Mn0.1O4 Particulate Composites—Electrical and Magnetic Properties", Integrated Ferroelectrics, Volume 82, Number 1 / 2006, pp. 1 – 24. |
[2] |
Ahn CW, Song HC, Nahm S, et al., "Effect of ZnO and CuO on the sintering temperature and piezoelectric properties of a hard piezoelectric ceramic," Journal of the American Ceramic Society 89 (3): 921-925, Mar 2006. |
[3] |
Uchino K, Zheng JH, Chen YH, et al., "Loss mechanisms and high power piezoelectrics", Journal of Materials Science 41 (1): 217-228, Jan 2006. |
[4] |
Islam RA, Priya S, "Annealing and aging effect in 0.95 Pb(Zr0.52Ti0.48)O-3-0.05 NiFe1.9Mn0.1O4 particulate magnetoelectric composites", Japanese Journal of Applied Physics Part 2-Letters & Express Letters 45 (4-7): L128-L131, Feb 2006. |
[5] |
Islam RA, Priya S, "
Realization of high-energy density polycrystalline piezoelectric ceramics", Applied Physics Letters 88 (3): Art. No. 032903, Jan 16 2006. |
[6] |
Hanson D., Bergs R., Tadesse Y., White V., Priya S., Enhancement of EAP actuated facial expressions by designed chamber geometry in elastomers, Proc. SPIE Vol.6168, p. 49-57, Smart Structures and Materials 2006. |
[7] |
Ahn CW, Song HC, Nahm S, et al., "Effect of MnO2 on the piezoelectric properties of (1-x)(Na0.5K0.5)NbO3-xBaTiO(3) ceramics", Japanese Journal of Applied Physics Part 2-Letters & Express Letters 44 (42-45): L1361-L1364, 2005. |
[8] |
Priya S, Ahn CW, Nahm S, "Dielectric Properties of (Ba-0.6 Sr-0.4)(Cu-1/3 Nb-2/3)O-3 system", Ferroelectrics 322: 75-82 2005. |
[9] |
Kim HW, Priya S, Uchino K, et al., "Piezoelectric energy harvesting under high pre-stressed cyclic vibrations", Journal of Electroceramics 15 (1): 27-34, Sep 2005. |
[10] |
Ahn CW, Song HC, Park SH, et al., "Low temperature sintering and piezoelectric properties in Pb(ZrxTi1-x)O-3-Pb(Zn1/3Nb2/3)O-3-Pb(Ni1/3Nb2/3)O-3 ceramics", Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers 44 (3): 1314-1321, Mar 2005. |
[11] |
”Plastic 95-GHz Rectangular Waveguides by Micro Molding Technologies,” F. Sammoura, Y. C. Su, Y. Cai, C.-Y. Chi, B. Elamaran, Liwei Lin and J.-C. Chiao, Sensors & Actuators, Vol. 127, pp. 270-275, 2006. |
[12] |
“Fabrication Processes of MEMS Phase Shifters on Polymer-based Substrates,” Jianqun Wang, Ying Cai, Thermpon Ativanichayaphong, Wen-Ding Huang, Lun-Chen Hsu, Mu Chiao* and J.-C. Chiao, SPIE International Smart Materials, Nano- & Micro-Smart Systems Symposium, Adelaide, Australia, Dec.10-13 2006. |
[13] |
“A Polymer-based RF MEMS Phase Shifter,” Jianqun Wang, Thermpon Ativanichayaphong, Ying Cai, Huang Wen-Ding, Mu Chiao and J.-C. Chiao, TEXMEMS, The VIII International Conference on Micro Electro Mechanical Systems, Oct. 9 2006. |
[14] |
“Plastic Micro Hot Embossing and Integration for Lost-Cost Millimeter-Wave Systems,” Ying Cai, Firas Sammoura, Liwei Lin, and J.C. Chiao, The 9th IEEE Emerging Technologies Conference (ETC 2006), Consumer Electronics, Mobility and the Digital Home, Richardson, Texas, September 15, 2006. |
[15] |
“Design considerations of reconfigurable antennas,” Thermpon Ativanichayaphong, Ying Cai, Jianqun Wang, Mu Chiao and J.-C. Chiao, Microelectronics, MEMS, and Nanotechnology Symposium, Microelectronics: Design, Technology, and Packaging Conference, Brisbane Australia, Dec. 11-14, 2005. |
[16] |
“Fabrication techniques for RF transmission lines on polymer substrates,” Jianqun Wang, Ying Cai, Thermpon Ativanichayaphong, Mu Chiao and J.-C. Chiao, Microelectronics, MEMS, and Nanotechnology Symposium, Microelectronics: Design, Technology, and Packaging Conference, Brisbane Australia, Dec. 11-14, 2005. |
[17] |
“Polymeric electro-optical channel waveguide fabricated by lithography and wet chemical etching,” Kevin Le, Ping Zhang, Hans Hu, and J.C. Chiao, Microelectronics, MEMS, and Nanotechnology Symposium, Photonics: Design, Technology, and Packaging Conference, Brisbane Australia, Dec. 11-14, 2005. |
[18] |
“Progress in the Development of the MEMS Based In-plane Micropump: Experimental Motion Characterization,” Smitha M.N. Rao, Saket Karajgikar, Jeongsik Sin, Dan Popa, Harry Stephanou, J.-C. Chiao, TEXMEMS, The VIII International Conference on Micro Electro Mechanical Systems, Oct. 9 2006. |
[19] |
“Development Of Integrative Wireless Sensor And Stimulator For Modulating Neuronal Activities,” T. Ativanichayaphong, J. He, Y.B. Peng, H. Stephanou and J.-C. Chiao, The 36th Annual Meeting, Society for Neuroscience, Neuroscience 2006, Atlanta, Georgia, Oct. 14-18 2006. |
[20] |
“MEMS-based Implantable Drug Delivery System,” Smitha M. N. Rao, Amit Mhatre, Dan O. Popa, J. -C. Chiao, Thermpon Ativanichayaphong, Jeongsik Sin, and Harry E. Stephanou, 2005 TexMEMS, The VII International Conference on Micro Electro Mechanical Systems, El Paso, TX, USA and Ciudad Juárez, Mexico. Sept. 21-22, 2005. |
Related Topics :
Smart Micromachines:
Discrete
Devices
Distributed
Devices
Flexible
Substrates
|