Micropumps

Research : Smart Devices : Discrete Devices : Micropumps

Micropumps

Design of in-plane silicon micropump.

DRIE machined silicon micropump structure.

Parylene tube placed in the pumping chamber.

Objective:

Low-cost implantable devices for drug delivery, with flow rates in the nano and micro liter per minute range.

Approach:

In-plane micropump

DRIE micromachined in-plane moving diaphragm structure. The in-plane structure can create small pumping volumes for precision flow control. Manufacturing requires only one mask to fabricate valves, pumping chamber, actuators, and channels.
Thermally or piezo actuated.
Stroke amplification mechanism to increase compression ratio.
Diffuser and nozzle structure to direct flow.
Molded Parylene tube to insulate flow from moving diaphragm.
Fluidic & electric interconnects using die bonding for compatibility with fluidic boards.

Out-of-plane micropump

PZT out-of-plane moving diaphragm integrated with a PDMS pumping chamber is shown below.
Simple design with valveless structure.
Low fabrication cost.
Low power operation.
High flow rate.

Applications:

Implantable drug delivery systems for the treatment of diabetes, pain, or chemotherapy. Cancer treatment will be improved by accurate, timely, and localized drug dispensing close to tumor site maximizing the drug effect while minimizing harmful influence on whole patient body.

Accomplishments:

Laboratory prototypes operational and fully characterized.
Application to in-vivo drug delivery for chemotherapy.
Comparison with off-the-shelf micropumps.

Publications:

[1]	A. Kole, J. Sin, W. H. Lee, D. Popa, D. Agonafer, and H. Stephanou, “Design of Polymer Tube Embedded In-Plane Micropump,” ITHERM, San Diego, 2006.
[2]	A. S. Kole, K. Bushan, J. Sin, W. H. Lee, D. Popa, D. Agonafer, and H. E. Stephanou, “Polymer tube embedded in-plane micropump: design, analysis and fabrication,” ASME Int. Mechanical Engineering Congress & Exposition, November, 2005.
[3]	J. Sin, W. H. Lee, and H. E. Stephanou, “In-Plane Micropump: Design Optimization,” Nanotech2004, March, Boston, 2004.
[4]	A.S. Kole, J. Sin, W.H. Lee, D. Popa, D. Agonafer, H.E. Stephanou, “Polymer tube embedded in-plane micropump: design, analysis and fabrication,” 2005 ASME International Mechanical Engineering Congress and Exposition, November 2005.
[5]	Kole, A.; Sin, J.; Lee, W.-H.; Popa, D.; Agonafer, D.; Stephanou, H.;” Polymer tube embedded in-plane micropump for low flow rate,” Digital Avionics Systems Conference, 2005, DASC 2005. The 24th, Volume 2, 30 Oct.-3 Nov. 2005 Page(s):7 pp. Vol. 2.
[6]	S.M.N.Rao, A. Mhatre, D. O Popa, J. C. Chiao, T. Ativanichayaphong, J. Sin, H.E. Stephanou, "MEMS-based Implantable Drug Delivery System", TEXMEMS VII International Conference on MEMS, El Paso, TX, September 2005.
[7]	A. Kole, K. Bushan, J. Sin, W.H. Lee, D. O. Popa, D. Agonafer, H.E. Stephanou. "Polymer Tube Embedded In-Plane Micropump,” TEXMEMS VII International Conference on MEMS, El Paso, TX, September 2005.