 |
| Fabricated and packaged sensor electrode. |
 |
| Detection principle based on capacitance
measurement. |
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| Experimental sensor board for chemical
testing. |
|
Objective:
Development of a capacitive, highly
selective NOx sensor and integration in a chemical health
monitoring system.
ApProach:
- Inter-digitated electrode to detect capacitance
changes.
- Deposited organic polymer films, highly
selective to the target gas.
- Packaging with embedded
electronics to improve sensitivity and SN ratio.
Accomplishments:
- Microfabricated electrode array and wirebonded
package.
- Completed gas sensor testing infrastructure with
PPB-levels gas mixing and flow control system.
- COTS sensor testing for sensitivity and selectivity
characterization and benchmarking.
Gas sensor testing infrastructure
with a gas mixing system
Related Topics :
Discrete Devices :
Medical
Microdevices
Piezoactuators
Piezotransformers
Energy
Harvesting
Micropumps
Microspectrometer
NOx Microsensor
Magnetoelectric
Sensors
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