Smart micromachines are essentially heterogeneous microscale systems consisting of integrated sets of sensors, actuators, processors, and fluidic, optical or RF circuits. They can be embedded into smart materials, possibly on flexible substrates, or packaged as discrete standalone devices, or networked into integrated systems with power harvesting, communications and/or self-diagnostics features. Key elements of our program include a focus on piezoelectric materials and on applications to medical microdevices.
Micromanufacturing is a major component of the research program, and addresses the challenges associated with developing small-lot manufacturing processes. This is a critical requirement for the commercialization of inexpensive, possibly disposable, yet reliable, micromachines for typically fragmented markets. Our focus is on back-end processes such as automated packaging, assembly and testing processes, which can account for 85% of the cost of microsystems. Key elements of our approach include process and equipment modularity and reconfigurability, a multiscale architecture for precision robotics, 3D processes for wafer level packaging, architectures for diagnostics and prognostics, and a new thrust on design for reliability.
While robotics plays an important role in the manufacturing of micromachines, it is interesting to note that micromachines also play an important role in the design of the next generation of Humanoid Robots. These are designed to share workspace and safely interact with humans in a diversity of settings.
Supporting the research program is a series of technology platforms that is used to demonstrate and validate new concepts, capabilities and applications. These platforms provide: (i) research continuity by capturing and preserving intellectual residuals, (ii) a common market pull for realistically complex applications, (iii) focal points for interdisciplinary work, and (iv) launching pads for short-term, high-leverage industrial projects.
