 |
| Layout of energy microgenerator
die: 1cm²
with arrays of microcantilever beams. |
|
Overview:
- Develop piezoelectric devices using MEMS technology
and targeting applications to sensors, actuators, and
power generators.
- Develop piezoelectric materials and deposition processes
compatible with flexible substrates.
- ARRI MEMS software design and simulation tools
include Intellisuite's Piezo MEMS library.
Cross Section of Piezo MEMS microcantilever
beam
Approach:
- Sol-gel process for deposition of BaTiO3 and Pb(Zr,Ti)O3
thin films.
- Novel lithography and etching techniques to realize
complex structures.
- Combination of heterogeneous materials on the same
substrate.
Process flow for depositing BT thin films.
Publications:
[1] |
Uppal N, Shiakolas PS, Priya S, "Micromachining of PZT using ultrafast femtosecond laser", Ferroelectrics Letters Section 32 (3-4): 67-77 2005. |
[2] |
S. Mukherjee, W. H. Lee, R. A. Islam, and S. Priya, “High Energy Density Piezoelectric Materials and Applications,” 2006 U.S. Navy Workshop on Acoustic Transduction Materials and Devices, The Penn State Conference Center, Pennsylvania, May 2006. |
[3] |
W. H. Lee, D. Popa, J. Sin, V. George, and H. E. Stephanou, “Compliant Microassembly of MEMS,” Sharing Solutions for Emergencies and Hazardous Environments, Utah, February 2006. |
Related Topics :
Control :
Femtosecond
Laser Machining
PiezoMEMS
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