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TEXMEMS-V Home
Invited Speakers
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TECHNICAL SCHEDULE May 6, 2003
Posters presentations below Oral presentations in this page
ORAL PRESENTATIONS: --------------------------------------------------- 9:55-11:55 AM (Auditorium) MEMS
Devices and MicroSensors
Session Chairs:
A. Beskok and Celik-Butler 9:55AM Rarefaction Effects On Energy Dissipation Of Laterally Oscillating
Microstructures
Authors: Ali Beskok and Jae Hyun Park Texas A&M University 10:10AM
Design
and Fabrication of a Variable-Focusing Microlens
Authors: Jackie Chen, Weisong Wang, Ji Fang, Kody Varahramyan Lousiana Tech University 10:25AM Surface Micro-machining Construction Method of a Pin Joint Actuated
Pinion-Gear
Mechanism With Only 2-Active Poly-Si Layers
Author: Dr. Emmanuel Saucedo Flores Universidad de Guadalajara, Mexico. 10:40AM
Design
and Fabrication of a Micromachined Infrared Fabry-Perot Interferometer Authors: Rohit Srivastava, Javeed Shaikh Mohammed, Swetha Chinnayelka,, Michael J
McShane Lousiana Tech University 10:55 AM Design Optimization of Micromachined High Aspect Ratio 3D On-chip Solenoid
Inductor
Authors: Hong
Lu, Karthik Colinjivadi and J-B. Lee The University of Texas at Dallas 11:10
AM A
High Sensitive SiO2 Microcantilever for Micro-Sensor Application
Authors: Yanjun Tang, Ji Fang, Xiaodong Yan, and Haifeng Ji Lousiana Tech University 11:25
AM Micromachined
Infrared Microsensors on a Flexible Substrate Authors:
Shadi A. Dayeh, Zeynep Çelik-Butler and Donald P. Butler The University of Texas at Arlington 11:40
AM Synthesis
And Fabrication Of Pmma Tunneling Accelerometer
Authors:
Jing Wang, Yong Zhao, Tianhong Cui, and Kody Varahramyan
Lousiana
Tech University
9:55-11:55 AM (Room 125) Microfluidics,
Microengines and Optical MEMS Session Chairs:
E. Kolesar and J-C Chiao 9:55AM
Characterization
of an Intelligent Micro-Sensor/Pump by Stroke Volumes and Flow Rates
Authors:
Bashar Hammad and T.C. Yih The University of Texas at Arlington
10:10AM
Optical
MEMS Fabrication Based upon Ink-Jet Printing Technology Authors:
Ting Chen, Donald J. Hayes, and David B. Wallace MicroFab
Technologies, Inc.
10:25AM An On-Chip Micro-Flow Cytometer based on Dieletropheritic Particle Focusing Authors:
Choongho Yu, Li Shi, Jody Vykoukal,
Peter R.C. Gascoyne The University of Texas at Austin 10:40AM
Geometric
Optimization of a Meso-Scale Non-Moving Parts Tesla Flow Valve Authors: Andreas O. Frank, Maher Lagha, Marc Zampino, W. Kinzy Jones, and James E.
Moore Jr. Applied Research Associates, Inc. 10:55AM
Electrothermal
Mems Microengine Capable Of Bi-Directional Motion Authors: Edward S. Kolesar, William E. Odom, Joseph A. Jayachandran, Matthew D. Ruff,
Simon Y. Ko, Jeffery T. Boydston,
Jorge E. Bosch, Richard J. Wilks and Justin B. McAllister Texas Christian University 11:10AM
Inkjet
Printing Metallic layer on Flexible Polyimide Substrate for Semiconductor and
MEMS Device Applications
Author: Zhengchun Liu, Yi Su, and Kody Varahramyan Lousiana Tech University
11:25AM Finite Element Modeling of Micro machined Silicon Cantilever Beam for Gas
Flow Sensor Application Authors: Jayaram.N. Sermadevi and Y. Su
11:40AM
Microscale
Ethanol/Water Separation By Pervaporization Authors:
Sudhir Ramprasad, Scott Forrest and James Palmer Lousiana
Tech University --------------------------------------------------
--------------------------------------------------- 4:10-5:25 PM (Room 125) Fabrication
Issues Session Chairs:
J. B. Lee and D. Butler Authors: Yohannes Desta, Jost Goettert, Flavio Aristone, Abhinav Bushnan, Proyag Datta, Josef Hormes, Josef Kouba, Kun Lian, Zhong-geng Ling, Changgeng Liu,
Shaloma
Malveaux, Tracy Morris, Zhengchun Peng, Dawit Yemane Lousiana Tech University 4:25PM “Active Sockets” For Precision Automated Assembly
Authors: Rahul Saini Zyvex Corp. 4:40PM
Essential
Tools and Process for Multifunctional Integrated Systems
Authors: Dr. Shari Farrens EV Group Inc. 4:55PM High-aspect-ratio Polymer-based Electrostatic Comb Drive by Hot Embossing
Process
Authors:
Yongjun
Zhao, Jing Wang, and Tianhong Cui Lousiana Tech University 5:10PM Realization of High-Aspect Ratio Sub-Micron Metallic Structures Using SU-8 as
a Resist
for Electron Beam Lithography
Authors: Arun Kumar Nallani, Daniel Sang-Won Park, Jeong-Bong Lee
University of Texas at Dallas
--------------------------------------------------- 4:10-5:25 PM (Room 115) Test
and Evaluation Issues Session Chairs:
S. Joshi and TC Yih 4:10PM Optical Surface Mapping In The Service Of MEMS Development And
Manufacturing
Authors: Dr. Yoel Arieli, Mr. Shay Wolfling, Mr. David Banitt, Mr. Barry
Gottlieb Nano-Or Technologies Ltd. 4:25PM
Co-Simulation
& Design Of Mems & Electronic Circuits
Authors: Chris Kennedy and Mark da Silva COVENTOR 4:40PM
Theoretical
Assessment of Particle Impact on DMD Superstructure Yield
Authors: Cuiling (Sue) Gong Texas Instruments Inc. 4:55PM
Micro
Tribo Tester To Characterize Micro Bearing Systems
Authors: Daejong Kim, Sanghoon Lee, Michael D. Bryant, and Frederick F. Ling The University of Texas at Austin 5:10PM Design of a Microfabrication Manufacturing System Based on Hot Embossing Technology Authors: P. S. Shiakolas, S. P. Joshi, S. Belligundu, R. Thanu, D. Ghosh, A. Deshmukh, D. Bennett, C. Carrillo, L. Gibson.
The University of Texas at Arlington
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POSTER PRESENTATIONS: --------------------------------------------------- Fabrication Issues
(Session Fabrication
of Silicon Microstructures: 3-D Micromachining with KOH solution
Authors:
J. Aragón and W. Calleja
Instituto Nacional de Investigaciones Ópticas y Electrónica, México. Microbubble
formation from a microchannel Authors:
Sung S. Kim, Michael J. McShane, and Roy W. Schubert Lousiana Tech University
Integration
of Soft Lithography and Nanotechnology for the development of a Platelet
analyzer
Author: S. Sah,
Yuri M.
Lvov, and
S. Jones Lousiana Tech University Polymer/Metal
Micromachining Methods and Their Role in the Development of MEMS-Based,
Heterogeneous Microsystems Authors: Kasbeog Kim, Trent Huang, Robert Folaron, Erik Nilsen (Zyvex Corporation, Richardson, TX), Hong Lu, Karthik S. Colinjivadi, Daniel S. Park, J.B. Lee (University of Texas
at Dallas, Dept. of Electrical Engineering, Dallas, TX), Kyunghwan Kim University, Dept. of Electrical & Information Engineering, Sungnam, Korea). Influence
of the RF Power and N2/SiH4 Ratio on the Chemical Bond in SiNx Deposited by
PECVD at Low Frequency Authors: R. Pérez-Blanco1,2, A. Torres-Jacome1, C. Zuñiga-Islas1, A. Munguia-Castillo1 and A Heredia-Jimenez1. 1Instituto Nacional de Astrofísica, Óptica y Electrónica, 2Universidad
Autónoma de Ciudad Juárez.
--------------------------------------------------- Microengines
and Micropower Devices (Session Design
and Operation of a MEMS Microengine Fabricated from Asymmetrical Polysilicon
Surface Micromachined Electrothermal Microactuators
Author: Alfred J.
Jayachandran and Edward S. Kolesar Texas Christian University A
Repulsive Type Electrostatic Micro Motor Utilizing Corona Discharges Author:
Sanghoon
Lee, Daejong Kim, Michael D. Bryant, Frederick F. Ling The
University of Texas at Austin
Characterization
of Symmetrical and Asymmetrical Polysilicon Surface Micromachined
Electrothermal Actuators
Author:
William E. Odom and Edward S. Kolesar
--------------------------------------------------- Microfluidics
(Session
2,
demonstrations
by
4:10-5:25
PM) Analytical
Modeling of Circular Micropump Membrane Actuated by an
Electromagnetic
Actuator Authors:
Mohammad A. Mayyas and T.C. Yih The
University of Texas at Arlington Laminar
flow Nano-assembly of Polyion Complexes Inside Y-shaped Microchannels
Author: Dinesh S. Kommireddy, Dmitry G. Shchukin and Yuri M. Lvov
Lousiana Tech University
Membrane
Deflection Analysis Of The Intelligent Micro-Sensor/Pump Under The
Consideration Of Micro-Viscosity And Membrane Pillar
Author: Shalini R. Gillella and T.C. Yih
The University of Texas at Arlington --------------------------------------------------- MEMS Devices
(Session
2, demonstrations by
4:10-5:25
PM) Surface
Micromachined Microbolometers on Polyimide (PI) Substrates Authors:
Aamer
Mahmood, Donald P. Butler, Zeynep Celik-Butler The University of Texas at Arlington Three-Dimensional
Microelectromechanical Systems (MEMS) Structures Assembled from Polysilicon
Surface Micromachined Elements Containing Continuous Hinges and Microrivets
Authors:
Matthew D. Ruff and Edward S. Kolesar
Texas Christian University Fabrication
and characterization of an all-polymer Hetero-junction diode using Ink-jet
printing technique
Authors: Fengliang
Xue, Yi Su, Kody Varahramyan Lousiana Tech University Ultrasensitive
Nerve Agents Detection Using Microcantilevers Authors:
Hai-Feng Ji, Yuming Yang, Yanjun Tang, Xiaodong Yan, Yuri
Lvov, Ji Fang Lousiana
Tech University
High
Precision Femtosecond Laser Micromachining For Rapid Manufacture Of MEMS
Devices Authors:
A. Bulusu, S. P. Joshi, P. S. Shiakolas The
University
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