Fundamental MEMS, an Introduction to
Microelectromechanical Systems (MEMS)
Texas
Christian University
Course
ENGR 40970
The
University of Texas at Arlington
Course
EE 5349/4328
|
Time and
location |
TTh 3:30 - 5:20 p.m., Nedderman Hall,
Room 105 Summer Semester, 2002 28 May – 9 August |
Instructors |
Edward
S Kolesar, Ph.D., P.E., W.A. Moncrief Professor of Engineering Department
of Engineering Tucker
Technology Center, Room 212 Texas
Christian University, Fort Worth, TX 76129 tel: (817) 257-6226; -7126 fax: (817) 257-7704 email: e.kolesar@tcu.edu Office
hours: by appointment. Frank
L. Lewis, Ph.D., P.E., Moncrief-O’Donnell Endowed Chair Department
of Electrical Engineering Automation
and Robotics Research Institute (ARRI) The
University of Texas at Arlington 7300
Jack Newell Blvd. South Fort
Worth, Texas 76118-7115 tel.
817-272-5972 fax.
817-272-5989 email: flewis@controls.uta.edu Office hours: by appointment. |
|
RA/TA |
José Mireles Jr. Automation
and Robotics Research Institute (ARRI) The
University of Texas at Arlington 7300
Jack Newell Blvd. South Fort Worth,
Texas 76118-7115 tel.
817-272-5955 fax.
817-272-5989 email: jmireles@arri.uta.edu Office
hours: by appointment. |
Streaming videos
(choose MEMS TCU
Section)
Course schedule (use
Acrobat reader 4.0, or later version):
|
May
28 |
Introduction:
history of MEMS, market for MEMS, overview of MEMS processes, properties of
silicon, a sample MEMS process. |
|
May
30 |
Basics
of Microtechnology: definitions and terminology, a sample
process, lithography and etching. References: "There's Plenty of Room at the
Bottom" by Richard Feynman (reprinted in Journal of
Microelectromechanical Systems, March 1992); "Silicon as a
Mechanical Material" by Kurt Petersen (Proceedings of the IEEE, May 1982). |
|
June
4 |
MEMS
Biosensors: |
|
June
6 |
Introduction
to MEMS Pro design software. |
|
June
11 |
Micromachining:
subtractive processes (wet and dry etching), additive processes (evaporation,
sputtering, epitaxial growth). |
|
June
13 |
Fundamental
Devices and Processes: basic mechanics and electrostatics for MEMS,
parallel plate actuators, pull-in point, comb drives. References: "Laterally Driven Polysilicon
Resonant Microstructures" by W. C. Tang, T.-C. H. Nguyen, and R. T. Howe
(Proc. IEEE MEMS, February 1989); "Electrostatic-Comb Drive
of Lateral Polysilicon Resonators" by W. C. Tang, T.-C. H. Nguyen, M. W.
Judy, and R. T. Howe (Transducers, June 1989). |
|
June
18 |
Fundamental
Devices and Processes: more electrostatic actuators; MEMS foundries,
Cronos MUMPs (multi user MEMS process). |
|
June
20 |
MUMPs
Multi User MEMS Process: review Tang et al. papers; JDS Uniphase MUMPs
processing sequence and design rules. |
|
June
25 |
MUMPs
and SUMMiT: design rules; applications; micro hinges and
deployment actuators. Handouts:
none. |
|
June
27 |
CMOS
MEMS: CMOS foundry processes, integrated IC/MEMS, MEMS postprocessing,
applications. |
|
July
2 |
Cleanroom
lab techniques: clean rooms, gowning procedures; safety, fire,
toxicity; acids and basis; photolithography.
|
|
July
9 |
Thermal
Transducers: bimorphs, "heatuators", cilia
arrays. Handouts:
none. |
|
July
11 |
MicroOptoElectroMechanical
Systems (MOEMS): micro scanners, digital mirror display,
retinal scanning display. Handouts:
none. |
|
July
16 |
MicroOptoElectroMechanical
Systems (MOEMS): grating light valve, corner cube
retroreflector, optical switches, other micro-optical devices. Lecture
Notes: Lecture
11 |
|
July
18 |
.
Piezoresistivity; Scanning Probe Microscopy: scanning tunneling microscope (STM), atomic force
microscope (AFM). |
|
July
23 |
Scaling
Laws; Midterm Examination review and
Q&A. |
|
July
25 |
Midterm
exam |
|
July
30 |
Wireless
MEMS: mechanical and electrical resonators, Q-factor, switches,
filters. |
|
August
1 |
Power
for MEMS: thin film batteries, micro fuel cells, energy fields, ... |
|
August
6 |
MEMS
Packaging and Assembly: microassembly: serial and parallel, deterministic
and stochastic; microgrippers: HexSil process; packaging techniques. |
|
August
8 |
The
Future of MEMS: bioMEMS - neural implants, gene chips,
diagnostic chips; MEMS in space; mechanical computers; invisible and
ubiquitous computing. Project
summaries due: Approximately
4 pages, conference paper style; describe the underlying ideas, the performed
work, the obtained results, and your conclusions (check template above main
schedule). |
Solutions Hmk#1: Minimum
solution, Good solutions: soln1, soln2, soln3, soln4.
Solution Hmk#2. Instructor’s
solution.
Solution Hmk#3. Instructor’s
solution.
Paper
needed for assignment 4. Some equations
needed. Bimorph cantilever equation.
Solution Hmk#4. Cvp,
p1, p2, p3, p4, p5, p6, p7, p8, p9, p10, p11, p12, paper.
Last
change made by 8/09/02
This
page is maintained by José Mireles Jr. jmireles@arri.uta.edu