Research

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Note: The page is under construction...Only published results are presented.

MEMS Modeling 

Modeling Method for MEMS Thermal Actuators (ppt /pdf - 77kB) - published in: "B. Borovic, F. L. Lewis, D. Agonafer, E. S. Kolesar, M. M. Hossain, D. O. Popa, Method for Determining a Dynamical State-Space Model for Control of Thermal MEMS Devices, Journal of Microelectromechanical Systems, Vol. 14, Issue 5, Nov. 2005."

Lateral Instablity and Capacitive Sensing (ppt /pdf - 210kB) - published in: "B. Borovic, A.Q. Liu, D. Popa, Z. Xuming, F. L. Lewis, “Lateral Motion Control of Electrostatic Comb Drive: New Methods in Modeling and Sensing,” 16th IASTED International Conference on Modelling and Simulation, May 18-20, 2005, Cancun, Mexico."

Parallel plate electrostatic actuator modeling - detailed dynamic model for both charge and voltage actuation

Electrostatic comb actuator modeling - detailed dynamic model for both charge and voltage actuation

Electrostatic comb actuator modeling - Detailed multi degree-of-freedom (DOF) model for lateral instability analysis

MEMS Control

Preshaped Open Loop and Closed Loop Actuation (ppt /pdf - 267kB) - published in: "B. Borovic et. al., Open-loop vs closed-loop control of MEMS devices: choices and issues, J. Micromech. Microeng. 15 (2005) 1917-1924."

Optical Feedback / Capacitive feedback

Device - Optical Waveform Generator

Light Intensity Control - Observer approach

Charge Injection - RF switch (parallel capacitor), Comb Actuator

Implementation Issues / Analog Controllers

Operational Amplifiers ("Actuators") - High Voltage CMOS, Power Operational Amplifiers   

Research Supported by:

    National Science Foundation (NSF)

    Army Research Office (ARO)

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Last update: 09/10/05